Varian VHS-4 Manuale delle Istruzioni

VHS-10 &VHS-400DiffusionPumpsInstruction ManualVarian Vacuum Technologies121 Hartwell AvenueLexington, MA 02421-3133(781) 861-7200(800) 8-VARIANMa

viii. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tissuesor eyes, it can cause severe frostbite or

viiiWARNING_____________High voltages (up to 480 V) can kill. Always break the primary circuit tothe power supply before starting to work on the heate

ixNOTE________Always dispose of used or dirty oil properly and in compliance with alllocal, state, and federal environmental laws and regulations.CAUT

x

Table of ContentsSection PageSafety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1-1SECTION ISPECIFICATIONS AND INSTALLATIONBefore unpacking and installing the VHS-10 or the VHS-400 Diffusion Pumps, the user should thor-oughly fami

Specifications and Installation1-2Table 1-1. VHS-10 Pump Specifications (Cont'd)Foreline Baffle Stacked, self-aligning half moonCold Cap Nickel-p

Specifications and Installation1-3Table 1-2. VHS-400 Pump Specifications (Cont'd)Pressure drop across coils 6 psi Backing Pump Size Recommended 3

Specifications and Installation1-41-2-2 Pump Oil Installationa The recommended oil charge for the VHS-10 and the VHS-400 diffusion pumps is 1000 cc.b

Specifications and Installation1-5b The exit water temperature should not exceed 120°F.c The outlet or discharge (nearest the foreline) should be conn

United StatesVarian Vacuum Products121 Hartwell AvenueLexington, MA 02421USA Tel: (781) 861 7200Fax: (781) 860 5437Toll Free: 1 (800) 882 7426Argentin

Specifications and Installation1-6b Connect the leads of the thermal switch in series with the coil of the heater power supply. Inthe event of overtem

2-1SECTION IIOPERATIONCAUTION________Damage to PumpDo not turn on the heater without fluid in the pump. This may ruin theheaters and damage the pump.D

Operation2-22-2 SHUTDOWN PROCEDUREa Turn off the power to the diffusion pump. Continue to back the diffusion pump with the appro-priate mechanical pum

3-1SECTION IIIMAINTENANCE AND SERVICE3-1 GENERALDiffusion pumps generally require little attention when operated correctly. It is advisable to perform

Maintenance and Servicef Thoroughly clean the diffusion pump body interior and the jet assembly using acetonefollowed by an isopropyl alcohol rinse. D

Maintenance and Service3-3Figure 3-1 Jet Assembly, VHS-10 and VHS-400 Pumps

Maintenance and Service3-4To install the jet assembly, proceed as follows.a Place the splash baffle in the bottom of the pump. Check that it is locate

Maintenance and Service3-5d Loosen and remove the fill plug located at the top of the sight glass assembly.e Add pump fluid until the fluid level is e

Maintenance and Service3-6

4-1SECTION IVTROUBLESHOOTING4-1 LEAKAGEAnalysis of general operational experience with diffusion pumps indicates that certain locations aremore prone

WARRANTYProducts manufactured by Seller are warranted against defects in materials and workmanship fortwelve (12) months from date of shipment thereof

Troubleshooting4-2Table 4-1 TroubleshootingFault Probable Cause Corrective ActionPoor system pressure Leaks in system, virtual or real Locate and repa

5-1SECTION VREPLACEMENT PARTSThe following is a list of replacement parts for the Varian VHS 10 and VHS 400 Diffusion Pumps.Table 5-1 Replacement Part

Replacement Parts5-2Table 5-1 Replacement Parts (Cont’d)Part Number Description K0377169 O-ring kit; includes:(VHS-400 only) 1 Butyl inlet O-ring, Par

Replacement Parts5-3Figure 5-1 Wiring Diagram,VHS-400 Diffusion Pump

Replacement Parts5-4VHS-10 Pump VHS-400 PumpVHS-10 VHS-400ASA ISO ConFlat ASA ISOin mm in mm in mm in mm in mmA Height 31.00 787 31.00 787 31.00 787 3

Replacement Parts5-5Figure 5-3 VHS-10 Pump Performance CurvesFigure 5-4 VHS-400 Pump Performance CurvesNOTE________Speed curves were generated accordi

Replacement Parts5-6Old Style – Typical New Style – TypicalFigure 5-5 Fill and Drain Assemblies

iOPERATION AND MAINTENANCE OF THIS EQUIPMENT INVOLVES SERIOUS RISK. IT IS THERESPONSIBILITY OF THE USER TO MAINTAIN SAFE OPERATING CONDITIONS AT ALL T

iiSAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THERESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGHREDUND

iiiTHE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONEOR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF

ivHazard Suggested Corrective ActionExplosion Integrate pressure relief valves in all systems using pumps 10 inches or larger in diameter.Do not use o

vProhibited Action Explosion-Causing ConditionOpen drain or fill plug while pump is Overpressure plus strong oxidizerunder vacuum, especially when it

vid. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corrosivegas, vapors, or chemicals, even proper operation and reg